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Surface Technology Systems plc is a leading provider of specialist plasma etch and deposition systems to customers in the MEMS, Optoelectronic, Compound Semiconductor, Wafer Level Packaging and Thin Film Head industries.
Following an offer to other STS shareholders in August 2007, Sumitomo Precision Products Co., Ltd has successfully acquired the remaining shares of STS, which is now a wholly-owned subsidiary of the Japanese parent company. For more details click here. |
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MEMS (Micro Electro Mechanical Systems) is a rapidly growing market, within which STS etch and deposition technologies are ideally suited to provide high rate, deep silicon etching using DRIE, SOI etching, high aspect ratios, smooth vertical sidewalls, dry low-damage release etches and deposition of low stress films. |
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Compound Semiconductor devices are made from a wide range of materials, traditionally based on GaAs, GaN, InP, and GaP, often in complex epitaxial layered structures. STS offers ICP and RIE etch processes for all these materials and emerging materials like SiN. |
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As communications move towards all-optical networking, demand for passive and active optical components is increasing. STS is the market leader in PECVD deposition of doped and undoped core and cladding layers for planar waveguides, and offers AOETM etch for core definition. |
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Advanced Packaging of semiconductor devices to reduce die size and costs presents device manufacturers with many challenges. STS processes are used in innovative packaging solutions, e.g. for through-silicon vias (TSVs), controlled etch profile, and sealing layers. |
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Since pioneering the use of ICP technology for Al2O3/TiC etching in 1991, STS have continued to develop their systems to meet the ever increasing demands of etching air bearing surface (ABS) and other materials used in Data Storage technology. |
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 High Rate Si Etching
STS have recently demonstrated Si etch rates of over 50µm/min using their latest "Pegasus" DRIE source. This high etch rate processing offers key advantages to Si device manufacturers. For more details click here |
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