STS is dedicated to catering for the needs of many types of organisations from volume manufacturers to research institutes or universities. 

 

The wide range of wafer throughput requirements of our customers has led STS to develop a complete range of wafer handling platforms, from our CPX cluster tool, which can be configured with up to 4 plasma processing modules with fully automated cassette to cassette handling for high volume manufacturing, to our "entry-level" LPX system with its single-wafer vacuum loadlock and single process module for low volume R&D applications.

 

 

Over the years, STS has built a reputation for market-leading wafer processing technologies, and we believe all our customers should be able to match the best process module for their application with a wafer handling platform to suit their own wafer throughput requirements.

 

 

Platform and process module configurations all share a common control system architecture, PLC based with user interface software fully compliant with Windows SEMI E95.

Production systems can be configured with a number of options such as factory automation components.