Surface Technology Systems - Plasma etch and deposition for MEMS, Optoelectronic, Compound Semiconductor, Wafer Level Packaging and Thin Film Head

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Products / Wafer Handling Platforms / CPX Platform for volume manufacturing

The CPX provides the complete production platform to complement STS� market-leading plasma etch and deposition technologies.

The system consists of a single wafer automation platform, with twin vacuum cassettes and integrated wafer alignment, to service up to 4 STS plasma process modules.

Engineered to increase productivity and lower costs of ownership, the CPX combines STS' advanced process capability and proven PLC control system, with Brooks' "best in class" Marathon Express� 600 (MX600) wafer transport module (TM). SMIF and factory automation options available

Last modified 01/09/2010 04:46:13