STS’
VPX entry-level cluster platform provides production engineered wafer automation with a single vacuum cassette module and up to 3 process modules.
Designed to reduce the cost in the production and pilot production of devices that require STS advanced plasma etching and deposition processes, the
VPX enables fabs and foundries in the initial stage of introducing new device technology to maintain the highest automation standards whilst lowering the cost of ownership. |
Featuring STS’ proven PLC based control system, coupled with the Brooks Marathon Express® 400 (MX400), the
VPX provides both excellent automation reliability and faster wafer handling speeds delivering a low cost solution for your production requirements. SMIF and factory automation options available.
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