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Products / Wafer Handling Platforms / MACS Platform for Pilot Production

The MACS combines the in-vacuum wafer exchange of the MPX carousel load-lock with an atmospheric robot and cassette to offer the same throughput as a conventional single chamber vacuum cassette loaded cluster system.

The MACS is fully field-upgradeable. Simply purchase a manually loaded system for research & development, then upgrade to full cassette to cassette operation when you are ready to increase production volumes. If wafer volumes continue to increase the process chamber can also be incorporated into a cluster tool as all platform share common control system design.

Last modified 01/09/2010 04:46:13