Surface Technology Systems - Plasma etch and deposition for MEMS, Optoelectronic, Compound Semiconductor, Wafer Level Packaging and Thin Film Head

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Products / Wafer Handling Platforms / MPX Platform for R&D

The MPX platform combines a small batch vacuum load-lock with any of STS� etch or deposition plasma sources to produce a platform of unrivaled quality and reliability.

The MPX platform features a unique load-lock design for small batch requirements of up to 4 substrates at 100mm or 2 substrates at 200mm.

The MPX provides the ideal solution for R&D and pilot production environments with an easy upgrade path to cassette to cassette operation by adding a MACS module.

Last modified 01/09/2010 04:46:13