Surface Technology Systems - Plasma etch and deposition for MEMS, Optoelectronic, Compound Semiconductor, Wafer Level Packaging and Thin Film Head

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Products / Wafer Handling Platforms / LPX Platform for R&D

The LPX platform combines a manually-loaded, single wafer vacuum load-lock with any of STS' etch or deposition plasma sources to produce a low-cost platform for low volume or R&D applications.

Due to the common control platform shared between STS� platforms, the LPX provides top of class performance for all aspects of automation and interface.

Last modified 01/09/2010 04:46:13