Surface Technology Systems - Plasma etch and deposition for MEMS, Optoelectronic, Compound Semiconductor, Wafer Level Packaging and Thin Film Head

STS Partners

	Primaxx, Inc. are an SPP company, based in Allentown, PA. They specialize in the manufacture and development of systems for dry release of SiO₂ sacrificial layers, using HF/methanol. STS, SPP and their international network of agents act as Primaxx's exclusive sales and service representatives in Asia, Europe and America. For more details, click <here>
	XACTIX, Inc., based in Pittsburgh, PA, manufactures dry XeF₂ etch release technology for silicon based sacrificial materials. STS has acted as XACTIX's representative in Europe since 2002. XACTIX provides a number of systems for single wafer and batch processing. STS and XACTIX have also jointly developed a process module compatible with STS' cluster tool platform range for high volume MEMS manufacturing. For more details, click <here>
	Advanced Vacuum AB in Lomma, Sweden, manufactures open load vacuum etch and deposition equipment based on STS-licensed RIE and PECVD technology. Partnered with STS since 2005, STS provides global sales and support coverage. For more details, click <here>.

Last modified 01/09/2010 04:46:13