SPTS - SPP Process Technology Systems Limited
 
 
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About SPTS
SPP Process Technology Systems (SPTS) is a leading manufacturer of plasma etch and deposition and thermal processing equipment for the semiconductor industry.
 
Formed in 2009, following the merger of Surface Technology Systems and Aviza Technology, the company is a wholly-owned subsidiary of Sumitomo Precision Products Co., Ltd and has a worldwide installed base, and over 25 years experience in advanced process technologies such as:
  • Inductively Coupled Plasma (ICP) etching of silicon, dielectrics, polymers and metals
  • Deep Reactive Ion etching (DRIE) of silicon
  • Plasma Enhanced Chemical Vapour Deposition (PECVD)
  • Physical Vapour Deposition (PVD)
  • Ion Beam Deposition
  • Metal-Organic Chemical Vapour Deposition (MOCVD)
  • Atmospheric Pressure Chemical Vapour Deposition (APCVD)
  • Diffusion and LPCVD Furnaces

SPTS supplies processing equipment to the world's leading semiconductor device manufacturers and research institutions, and offers dedicated local sales and customer support through a network of international offices and agents.

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